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PDC200/PDC210/PDC510 – PD Series Single Stage Gas Plasma Dry Cleaners – Yamato

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$67,562.00 – $101,849.00

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High performance single stage, compact plasma cleaner suitable for R&D purposes

Features

  • Simple and compact plasma surface treatment device
  • RIE (Reactive Ion Etching) Plasma mode, with DP (Direct Plasma) mode as option
  • Excellent electrode structure for plasma uniformity
  • Simple touch panel system

Applications

  • Plasma processing of CSP, BGA, COB substratum
  • Removal of organic films and metal oxidized films
  • Dry cleaning of printed circuit board
  • Surfactant process LED assembly
  • For R&D
Models PDC200 PDC210 PDC510
Plasma Mode RIE (DP mode option) RIE (DP mode option) RIE / DP selectable
Electrode Structure Parallel flat stage plate
Vacuum Gauge Capacitance manometer
High Frequency Output Max 300W Max 500W Max 500W
Oscillation Frequency 13.56MHz Quartz oscillator
Output Setting Method Manual setting on the LCD touch panel
Matching Method Auto tuning
Controller Programmable
Display LCD touch panel
Chamber Size W400 × D250 × H150 mm W400 × D250 × H150 mm W500 × D300 × H200 mm
Stage Size W250 × D170 mm W250 × D170 mm W410 × D210 mm
Chamber Material Aluminum
Reaction Gas 2 systems (Argon, Oxygen)
Purge Gas Nitrogen or dry air
Reaction Gas Flow Control Flow meter Mass flow controller Mass flow controller
Rotary Vacuum Pump (Optional) ~345 l/min ~345 l/min ~500 l/min
External Dimensions WxDxH 540×600×600 mm 540×600×600 mm 700×700×700 mm
Weight ~100kg ~105kg ~180kg
Power Source 50/60Hz Single phase AC100V 15A 3-phase AC200V~AC240V 3-phase AC200V~AC240V
SKU: PDC200/PDC210/PDC510 Categories: , Tags: , , Brand:
Weight N/A
Dimensions N/A
Products

PDC-200 (GAS PLASMA DRY CLEANER 115V), PDC-210 (GAS PLASMA DRY CLEANER 200V-220V 3-PHASE)

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