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PR500-115V/PR500-220V/PR510- PR Series Compact Gas Plasma Asher – Yamato

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$59,746.50 – $78,284.80

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Compact, barrel type low temperature ashing device designed with a large chamber made of quartz considered almost completely resistant against most plasma processes

Features

  • Compact, space saving design with oscillation section integrated with a portion of the chamber
  • Outstanding operability and safety with the automatic tuning system as standand component
  • Equipped with a large quartz chamber (ø215mm) which can process big testing sampless

Applications

  • Removal of photoresist
  • Cleaning of parts
  • Surfactant treatment
  • Micro polishing
  • Corresponds to wafer and glass substrate
Models PR500-115V
PR500-220V
(FLOW METER)		 PR510
(MASS FLOW METER)
Method Barrel type chamber direct plasma Barrel type chamber direct plasma
High Frequency Output Max. 500W Max. 500W
Oscillating Frequency 13.56MHz
Tuning Method Automatic tuning Automatic tuning
Reaction Chamber Made of quartz, ø215×305mm Made of quartz, ø215×305mm
Reaction Gas Dual system (O₂ / CF₄)
Control System Manual Automatic touch panel
Piping Material Stainless steel, Teflon Stainless steel, Teflon
External Dimensions W×D×H 438×520×760 mm 520×630×760 mm
Weight ~60kg ~60kg
Power Source 50/60Hz AC115V 7.8A
AC220V 4.1A		 AC220V 7.3A
Three-phase
Standard Accessories Connection table (1 complete set), vacuum grease (1 pc.), o-ring for reaction chamber (1 pc.)
SKU: PR500-115V/PR500-220V/PR510 Categories: , Tags: , , Brand:
Weight N/A
Dimensions N/A
Products

PR-500-115V (GAS PLASMA REACTOR 115V), PR-500-220V (GAS PLASMA REACTOR 220V), PR-510 GAS (PLASMA REACTOR 220V 3-PHASE)

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